Khoom npe: tantalum sputtering phiaj Txheem tiav: B708-98 Specifications: txoj kab uas hla ntawm lub yeej phiaj (25-400) hli (3-28) hli * thickness Square phiaj specifications: thickness (1-12.7) ntawm hli * (10-600) hli * kom dav (200-2000) hli kam rau ua: tus kam rau ua txoj kab uas hla ntawm + / - 0.254...
Khoom npe:tantalum sputtering phiaj
Txheem tiav: B708-98
Specifications: txoj kab uas hla ntawm lub yeej phiaj (25-400) hli (3-28) hli * thickness
Xwmfab phiaj specifications: thickness (1-12.7) ntawm hli * (10-600) hli * kom dav (200-2000) hli
Kam rau ua: lub taub kam rau ua ntawm + / - 0.254
Hom: RO5200, RO5400, RO5252 (Ta-2.5W), RO5255 (Ta-10W)
Purity: 99.9%
Recrystallization: yam tsawg kawg 95%
Lis Qib: yam tsawg kawg 40 m
Nto roughness: Ra 0.8 ntau
Flatness: los 0.1 hli 0.10% ntau.
Lub hom phaj daim hlau tantalum
Tshuaj compostion
Gr | Main | lwm tus Max % | |||||||||||
Tib | Nb | Fe | Si | Ni | W | Mo | Ti | Nb | O | C | H | N | |
Ta1 | Nco ntsoov qhia | —— | 0.005 | 0.005 | 0.002 | 0.01 | 0.01 | 0.002 | 0.04 | 0.02 | 0.01 | 0.0015 | 0.01 |
Ta2 | Nco ntsoov qhia | —— | 0.03 | 0.02 | 0.005 | 0.04 | 0.03 | 0.005 | 0.1 | 0.03 | 0.01 | 0.0015 | 0.01 |
TaNb3 | Nco ntsoov qhia | <3.5 | 0.03 | 0.03 | 0.005 | 0.04 | 0.03 | 0.005 | —— | 0.03 | 0.01 | 0.0015 | 0.01 |
TaNb20 | Nco ntsoov qhia | 17.0~23.0 | 0.03 | 0.03 | 0.005 | 0.04 | 0.03 | 0.005 | —— | 0.03 | 0.01 | 0.0015 | 0.01 |
Ta2.5W | Nco ntsoov qhia | 0.005 | 0.005 | 0.002 | 3.0 | 0.01 | 0.002 | 0.04 | 0.02 | 0.01 | 0.0015 | 0.01 | |
Ta10W | Nco ntsoov qhia | 0.005 | 0.005 | 0.002 | 11 | 0.01 | 0.002 | 0.04 | 0.02 | 0.01 | 0.0015 | 0.01 |
Tug: Zirconium planar thiab rotatable phaj
Tom ntej: Kev molybdenum yam phiaj